The Preventive Maintenance & Basic Curative Certified Training allows a high level of experience on the system.  The goal is to develop customer’s knowledge on system operation, preventive maintenance and troubleshooting. This training is limited to 3 persons maximum.

Course content:

• System overview : operation, hardware & software
• Facilities : Description, specifications, calibrations
• Electrical components and electrical drawings description
• Parameters setting of the components
• Pumping: Description, calibration of the vacuum gauges, calibration of the APC
• Temperature control of the components
• Gas : Description, purges method, curves pressure gas flow, MFC offset calibration
• Substrate holder temperature and Helium regulation description and cleaning
• Transfer platform presentation: Checks and adjustments of transfer position and sensors
• RF : Matching box presentation, description/calibration of the tuning sensors, gain, match box and reactor maintenance
• PC and PLC training
• Maintenance: regular maintenance schedule , maintenance parts list , security stock.