The Preventive Maintenance & Basic Curative Certified Training allows a high level of experience on the system. The goal is to develop customer’s knowledge on system operation, preventive maintenance and troubleshooting. This training is limited to 3 persons maximum.
Course content:
- System overview : operation, hardware & software
- Facilities : Description, specifications, calibrations
- Electrical components and electrical drawings description
- Parameters setting of the components
- Pumping: Description, calibration of the vacuum gauges, calibration of the APC
- Temperature control of the components
- Gas : Description, purges method, curves pressure gas flow, MFC offset calibration
- Substrate holder temperature and Helium regulation description and cleaning
- Transfer platform presentation: Checks and adjustments of transfer position and sensors
- RF : Matching box presentation, description/calibration of the tuning sensors, gain, match box and reactor maintenance
- PC and PLC training
- Maintenance: regular maintenance schedule , maintenance parts list , security stock.