The Preventive Maintenance & Basic Curative Certified Training allows a high level of experience on the system.  The goal is to develop customer’s knowledge on system operation, preventive maintenance and troubleshooting. This training is limited to 3 persons maximum.

 

Course content:

  • System overview : operation, hardware & software
  • Facilities : Description, specifications, calibrations
  • Electrical components and electrical drawings description
  • Parameters setting of the components
  • Pumping: Description, calibration of the vacuum gauges, calibration of the APC
  • Temperature control of the components
  • Gas : Description, purges method, curves pressure gas flow, MFC offset calibration
  • Substrate holder temperature and Helium regulation description and cleaning
  • Transfer platform presentation: Checks and adjustments of transfer position and sensors
  • RF : Matching box presentation, description/calibration of the tuning sensors, gain, match box and reactor maintenance
  • PC and PLC training
  • Maintenance: regular maintenance schedule , maintenance parts list , security stock.